Research output per year
Research output per year
Content available in repository
Adriaan J.M. Mackus is Assistant Professor in the Plasma and Materials Processing group within the Applied Physics department at Eindhoven University of Technology (TU/e). His research encompasses thin film deposition and etching for applications in nanoelectronics, with a focus on selective processing for bottom-up fabrication.
Adrie Mackus earned his M.Sc. and Ph.D. degrees (both cum laude) in Applied Physics at Eindhoven University of Technology TU/e in 2009 and 2013, respectively. His doctoral thesis work “Atomic Layer Deposition of Platinum: From Surface Reactions to Nanopatterning” was carried out in close collaboration with the company FEI Electron Optics, and included a visit to Purdue University, USA in 2012. Mackus worked as a postdoctoral researcher at the department of Chemical Engineering at Stanford University from 2014 to 2016, for which he received a personal NWO Rubicon grant in 2014. At Stanford, he focused on the study of the atomic layer deposition (ALD) of ternary materials using in-situ techniques. After his postdoc, Mackus returned to TU/e in 2016 as Assistant Professor. Adrie is a founding member of the Early Career Investigator (ECI) network within COST action HERALD and chaired the 2nd Area Selective Deposition workshop (ASD2017) in Eindhoven in 2017.
Research output: Contribution to journal › Article › Academic › peer-review
Research output: Contribution to journal › Article › Academic › peer-review
Research output: Contribution to journal › Article › Academic › peer-review
Research output: Contribution to journal › Article › Academic › peer-review
Research output: Contribution to journal › Article › Academic › peer-review
Mackus, Adrie J.M. (Recipient), 22 Oct 2019
Prize: Other › Career, activity or publication related prizes (lifetime, best paper, poster etc.) › Scientific
A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member) & F. Roozeboom (Speaker)
Activity: Talk or presentation types › Contributed talk › Scientific
A. Mameli (Member), M.A. Verheijen (Member), B. Karasulu (Member), A.J.M. Mackus (Member), W.M.M. Kessels (Member) & F. Roozeboom (Invited speaker)
Activity: Talk or presentation types › Invited talk › Scientific
A.J.M. Mackus (Invited speaker)
Activity: Talk or presentation types › Invited talk › Scientific
Adriaan J.M. Mackus, Marcel A. Verheijen, Shashank Balasubramanyam & Marc J.M. Merkx
27/06/21
1 item of Media coverage
Press/Media: Expert Comment
M. (Adriana) Creatore (Researcher), W.M.M. (Erwin) Kessels (Researcher) & Adrie J.M. Mackus (Researcher)
Impact: Research Topic/Theme (at group level)
Ageeth A. Bol (Researcher), W.M.M. (Erwin) Kessels (Researcher) & Adrie J.M. Mackus (Content manager)
Impact: Research Topic/Theme (at group level)
Supervisor: Knoops, H. (Supervisor 1), Mulders, J. (External coach) & Kessels, W. (Supervisor 2)
Student thesis: Master